发明授权
US07619356B2 ITO film treated by nitrogen plasma and the organic luminescent device using the same 有权
通过氮等离子体处理的ITO膜和使用其的有机发光装置

ITO film treated by nitrogen plasma and the organic luminescent device using the same
摘要:
Disclosed are an Indium Tin Oxide (ITO) film, wherein nitrogen-containing compounds produced by reactions of nitrogen with at least one atom selected from the group consisting of In, Sn and O atoms which are constitutional elements of ITO, or deposited nitrogen-containing compounds are present on a surface of the ITO film; and a method for preparing an ITO film, comprising the step of treating a surface of the ITO film with nitrogen plasma. An organic electroluminescent device using the ITO film provided by the present invention as an anode shows a low voltage, a high efficiency and a long lifetime.
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