发明授权
- 专利标题: Mounting system
- 专利标题(中): 安装系统
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申请号: US11887212申请日: 2006-03-13
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公开(公告)号: US07621969B2公开(公告)日: 2009-11-24
- 发明人: Mutsumi Masumoto , Katsumi Terada
- 申请人: Mutsumi Masumoto , Katsumi Terada
- 申请人地址: JP Tokyo
- 专利权人: Toray Engineering Co., Ltd.
- 当前专利权人: Toray Engineering Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Smith Patent Office
- 优先权: JP2005-102746 20050331
- 国际申请: PCT/JP2006/304890 WO 20060313
- 国际公布: WO2006/112217 WO 20061026
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A mounting system is provided with a substrate loader section, a chip mounting section, and a substrate unloader section for sequentially taking out substrates whereupon chips are mounted. The mounting system is characterized in that the substrate loader section is provided with an oven capable of heat insulating a substrate together with a substrate magazine capable of containing a plurality of substrates, a stage heater for heating/heat insulating a substrate is provided, respectively, at a substrate conveying portion from a substrate waiting stage for the chip mounting section to the chip mounting section, at the chip mounting section, and at a substrate conveying portion from the chip mounting section to the substrate unloader section, and the substrate unloader section is provided with an oven capable of heat insulating a substrate together with a substrate magazine capable of containing a plurality of substrates whereupon chips are mounted. The substrate can be sustained at a desirable temperature over the substantially entire mounting process having a series of steps, and in particular, occurrence of problems ascribed to moisture absorption can be suppressed or prevented.
公开/授权文献
- US20090011538A1 Packaging system 公开/授权日:2009-01-08
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