Invention Grant
- Patent Title: MEMS thermal actuator and method of manufacture
- Patent Title (中): MEMS热致动器及其制造方法
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Application No.: US11705739Application Date: 2007-02-14
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Publication No.: US07622783B2Publication Date: 2009-11-24
- Inventor: Gregory A. Carlson , John S. Foster , Christopher S. Gudeman , Paul J. Rubel
- Applicant: Gregory A. Carlson , John S. Foster , Christopher S. Gudeman , Paul J. Rubel
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.
Public/Granted literature
- US20080191303A1 MEMS thermal actuator and method of manufacture Public/Granted day:2008-08-14
Information query
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