发明授权
- 专利标题: Organic thin film transistor and method of manufacturing the same, and semiconductor device having the organic thin film transistor
- 专利标题(中): 有机薄膜晶体管及其制造方法以及具有有机薄膜晶体管的半导体器件
-
申请号: US10978399申请日: 2004-11-02
-
公开(公告)号: US07626196B2公开(公告)日: 2009-12-01
- 发明人: Yoshiharu Hirakata , Tetsuji Ishitani , Shuji Fukai , Ryoto Imahayashi
- 申请人: Yoshiharu Hirakata , Tetsuji Ishitani , Shuji Fukai , Ryoto Imahayashi
- 申请人地址: JP Kanagawa-Ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-Ken
- 代理机构: Nixon Peabody LLP
- 代理商 Jeffrey L. Costellia
- 优先权: JP2002-225772 20020802
- 主分类号: H01L25/34
- IPC分类号: H01L25/34
摘要:
There have been problems in that a dedicated apparatus is needed for a conventional method of manufacturing an organic thin film transistor and in that: a little amount of an organic semiconductor film is formed with respect to a usage amount of a material; and most of the used material is discarded. Further, apparatus maintenance such as cleaning of the inside of an apparatus cup or chamber has needed to be frequently carried out in order to remove the contamination resulting from the material that is wastefully discarded. Therefore, a great cost for materials and man-hours for maintenance of apparatus have been required. In the present invention, a uniform organic semiconductor film is formed by forming an aperture between a first substrate for forming the organic semiconductor film and a second substrate used for injection with an insulating film formed at a specific spot and by injecting an organic semiconductor film material into the aperture due to capillarity to the aperture. The insulating film formed at the specific spot enables formation of the organic semiconductor film with high controllability. Further, the insulating film can also serve as a spacer that holds the aperture, that is, an interval (gap) between the substrates.
公开/授权文献
信息查询