发明授权
US07627009B2 Light-emitting device on n-type InP substrate heavily doped with sulfur
有权
在n型InP衬底上重掺杂硫的发光器件
- 专利标题: Light-emitting device on n-type InP substrate heavily doped with sulfur
- 专利标题(中): 在n型InP衬底上重掺杂硫的发光器件
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申请号: US11907135申请日: 2007-10-09
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公开(公告)号: US07627009B2公开(公告)日: 2009-12-01
- 发明人: Tomokazu Katsuyama , Michio Murata
- 申请人: Tomokazu Katsuyama , Michio Murata
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries Ltd.
- 当前专利权人: Sumitomo Electric Industries Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2006-276783 20061010
- 主分类号: H01S5/20
- IPC分类号: H01S5/20 ; H01S5/00 ; H01L33/00
摘要:
The present invention provides a structure of a light-emitting device which prevents the inter diffusion of impurities from the high-doped n-type InP substrate to a p-type current blocking layer. The substrate of the invention is highly doped with sulfur (S) to obtain high quality surface whose etch pit density (EPD) is less than 100 cm−2. The device includes such substrate, an optical guiding portion with an active layer, and a current blocking portion provided so as to bury the guiding portion. This current blocking portion includes, from the side of the substrate, a p-type layer, an n-type layer and another p-type layer. The device of the invention provides an n-type layer that is moderately doped with silicon between the n-type substrate and the p-type current blocking layer to prevent the inter diffusion of impurities from the substrate to the p-type layer.
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