Invention Grant
- Patent Title: Surface finish roughness measurement
- Patent Title (中): 表面粗糙度测量
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Application No.: US11623415Application Date: 2007-01-16
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Publication No.: US07630086B2Publication Date: 2009-12-08
- Inventor: Dave S. Oak , Tri Do , Ronny Soetarman , Steven W. Meeks , Vamsi Velidandla
- Applicant: Dave S. Oak , Tri Do , Ronny Soetarman , Steven W. Meeks , Vamsi Velidandla
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka, Neely & Graham, P.C.
- Main IPC: G01B11/24
- IPC: G01B11/24
Abstract:
A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.
Public/Granted literature
- US20070115483A1 SURFACE FINISH ROUGHNESS MEASUREMENT Public/Granted day:2007-05-24
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