发明授权
US07633117B2 Capacitorless DRAM with cylindrical auxiliary gate and fabrication method thereof
有权
具有圆柱形辅助门的无电容DRAM及其制造方法
- 专利标题: Capacitorless DRAM with cylindrical auxiliary gate and fabrication method thereof
- 专利标题(中): 具有圆柱形辅助门的无电容DRAM及其制造方法
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申请号: US11649478申请日: 2007-01-04
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公开(公告)号: US07633117B2公开(公告)日: 2009-12-15
- 发明人: Ki-whan Song , Hoon Jeong
- 申请人: Ki-whan Song , Hoon Jeong
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello, LLP
- 优先权: KR10-2006-0002378 20060109
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
Provided are a capacitorless DRAM (dynamic random access memory) and a fabrication method thereof. In a capacitorless DRAM, a pair of cylindrical auxiliary gates is formed within a bulk substrate. Thus, a volume of a channel body formed at a region where the cylindrical auxiliary gates contact with each other can be increased, while an area of a junction region where the channel body contact source and drain regions can be reduced. As a result, capacitance of the channel body can be increased, and a generation of leakage current through the second junction region can be reduced. The application of a back bias to the cylindrical auxiliary gates can improve a charge storage capability of the channel body.
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