Invention Grant
- Patent Title: Manufacturing method of semiconductor-on-insulator region structures
- Patent Title (中): 绝缘体上半导体区域结构的制造方法
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Application No.: US11713553Application Date: 2007-03-02
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Publication No.: US07638844B2Publication Date: 2009-12-29
- Inventor: Stéphane Monfray , Aomar Halimaoui , Philippe Coronel , Damien Lenoble , Claire Fenouillett-Beranger
- Applicant: Stéphane Monfray , Aomar Halimaoui , Philippe Coronel , Damien Lenoble , Claire Fenouillett-Beranger
- Applicant Address: FR Mountouge FR Paris
- Assignee: STMicroelectronics S.A.,Commissariat à l'énergie atomique
- Current Assignee: STMicroelectronics S.A.,Commissariat à l'énergie atomique
- Current Assignee Address: FR Mountouge FR Paris
- Agency: Wolf, Greenfield & Sacks, P.C.
- Agent Lisa K. Jorgenson; James H. Morris
- Main IPC: H01L23/62
- IPC: H01L23/62 ; H01L21/00

Abstract:
A single-crystal silicon region on insulator on silicon intended to receive at least one component, the insulator having overthicknesses.
Public/Granted literature
- US20080087959A1 Manufacturing method of semiconductor-on-insulator region structures Public/Granted day:2008-04-17
Information query
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