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US07642143B2 Method of fabricating thin film transistor having multilayer structure and active matrix display device including the thin film transistor 失效
制造具有多层结构的薄膜晶体管的方法和包括该薄膜晶体管的有源矩阵显示装置

Method of fabricating thin film transistor having multilayer structure and active matrix display device including the thin film transistor
Abstract:
Provided are a method of fabricating a multilayered thin film transistor using a plastic substrate and an active matrix display device including the thin film transistor fabricated by the method. The method includes: preparing a substrate formed of plastic; forming a buffer insulating layer on the plastic substrate; forming a silicon layer on the buffer insulating layer; patterning the silicon layer to form an active layer; forming a gate insulating layer on the active layer; stacking a plurality of gate metal layers on the gate insulating layer; patterning the plurality of gate metal layers; and etching a corner region of the lowest gate metal layer formed on the gate insulating layer of the patterned gate metal layers. Accordingly, a gate metal is formed which includes a multilayered gate metal layer and has an etched corner region, thereby reducing an electric field of the corner to reduce a leakage current of the TFT.
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