发明授权
- 专利标题: Three-dimensional flash memory cell
- 专利标题(中): 三维闪存单元
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申请号: US11781001申请日: 2007-07-20
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公开(公告)号: US07642156B2公开(公告)日: 2010-01-05
- 发明人: Seong-Gyun Kim
- 申请人: Seong-Gyun Kim
- 申请人地址: KR Seoul
- 专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人: Dongbu HiTek Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Sherr & Vaughn, PLLC
- 优先权: KR10-2006-0068974 20060724
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
Embodiments relate to a three-dimensional flash memory cell and method of forming the same that may be improve the uniformity of flash memory cell by removing a width difference of a polysilicon pattern when forming a floating gate of flash memory device, to thereby improve the reliability of semiconductor device. The process may be simplified due to the self-alignment in the step of forming the polysilicon pattern, which may improve the yield.
公开/授权文献
- US20080017918A1 THREE-DIMENSIONAL FLASH MEMORY CELL 公开/授权日:2008-01-24
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