Invention Grant
- Patent Title: Light source error detection apparatus and method
- Patent Title (中): 光源误差检测装置及方法
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Application No.: US12109972Application Date: 2008-04-25
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Publication No.: US07642495B2Publication Date: 2010-01-05
- Inventor: Tomohisa Ishikawa
- Applicant: Tomohisa Ishikawa
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2007-119363 20070427
- Main IPC: G01J1/32
- IPC: G01J1/32 ; G01J1/44 ; F21V1/00 ; H01L27/15

Abstract:
A light source error detection system and method including monitoring a plurality of characteristics of a light source and controlling the light source based on a plurality of monitored results. The system and method control the light source differently for a first case when only one of the monitored characteristics is abnormal than a second case when more than two of the monitored characteristics are abnormal. In controlling the light source, an output power of the light source is decreased with different time constant for the first case and the second case.
Public/Granted literature
- US20080265132A1 LIGHT SOURCE ERROR DETECTION APPARATUS AND METHOD Public/Granted day:2008-10-30
Information query
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