发明授权
- 专利标题: Mirror device
- 专利标题(中): 镜像设备
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申请号: US12220526申请日: 2008-07-25
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公开(公告)号: US07643195B2公开(公告)日: 2010-01-05
- 发明人: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- 申请人: Fusao Ishii , Yoshihiro Maeda , Hirotoshi Ichikawa , Naoya Sugimoto
- 申请人地址: JP JP
- 专利权人: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人地址: JP JP
- 代理商 Bo-In Lin
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/00
摘要:
A mirror device comprises: an electrode placed on a substrate; a hinge which is connected to the electrode and which has a flat part at an end part on a side opposite to the electrode; and a mirror placed on the flat part, wherein a protrusion part formed on the flat part is placed between the flat part and the mirror.
公开/授权文献
- US20080291524A1 Mirror device 公开/授权日:2008-11-27
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