发明授权
US07643197B2 Method of manufacturing oscillator device, and optical deflector and optical instrument having oscillator device
失效
制造振荡器装置的方法,以及具有振荡器装置的光偏转器和光学仪器
- 专利标题: Method of manufacturing oscillator device, and optical deflector and optical instrument having oscillator device
- 专利标题(中): 制造振荡器装置的方法,以及具有振荡器装置的光偏转器和光学仪器
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申请号: US12267803申请日: 2008-11-10
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公开(公告)号: US07643197B2公开(公告)日: 2010-01-05
- 发明人: Takahisa Kato , Kazutoshi Torashima , Takahiro Akiyama
- 申请人: Takahisa Kato , Kazutoshi Torashima , Takahiro Akiyama
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2007-301251 20071121
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width.