发明授权
- 专利标题: Highly responsive master-slave valve positioning
- 专利标题(中): 高灵敏度的主从阀定位
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申请号: US11278071申请日: 2006-03-30
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公开(公告)号: US07643909B2公开(公告)日: 2010-01-05
- 发明人: David J. Goldman , Martin Ryan , Vladislav Davidkovich , Gordon Hill
- 申请人: David J. Goldman , Martin Ryan , Vladislav Davidkovich , Gordon Hill
- 申请人地址: US MA Wilmington
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: McDermott Will & Emery, LLP
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.
公开/授权文献
- US20070235668A1 HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING 公开/授权日:2007-10-11
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