Invention Grant
US07643963B2 Apparatus, method and program for measuring surface texture 有权
用于测量表面纹理的装置,方法和程序

Apparatus, method and program for measuring surface texture
Abstract:
An apparatus for measuring surface texture causes a probe to trace a surface of a workpiece to detect contact between a tip provided on the tip of the probe and the surface of the workpiece and measures surface texture of the workpiece. The apparatus for measuring surface texture includes: a path division unit dividing a path along which the tip is moved into a plurality of sections between the starting point and the ending point of the path; a moving velocity calculation unit calculating a moving velocity of the tip in sequence from the starting point to the ending point for each of the plurality of sections, based on the path information for each of the plurality of sections; and a stylus movement control unit moving the tip in a section for which a moving velocity has been calculated at the moving velocity calculation unit.
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