发明授权
- 专利标题: Microscale gas discharge ion detector
- 专利标题(中): 微型气体放电离子检测器
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申请号: US11553948申请日: 2006-10-27
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公开(公告)号: US07645996B2公开(公告)日: 2010-01-12
- 发明人: Wei Yang , Ulrich Bonne
- 申请人: Wei Yang , Ulrich Bonne
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号: G01T1/29
- IPC分类号: G01T1/29 ; H01L21/30
摘要:
A microscale planar device for detecting particles under high pressure with high sensitivity. The device may have an anode and cathode with an insulator situated between them. The insulator may have a number of holes, cavities or channels between the anode and cathode. There may be conductive rings at the perimeters of openings of the channels on the anode side of the insulator. These rings may be a part of the anode. An ion may be attracted into one of the channels where it interacts with a gas to result in an avalanche breakdown. The breakdown may be detected by instrumentation connected to the anode and cathode. The lateral and/or longitudinal dimensions of the channels may be such that the device may operate as a detector with ambient air as a gas under its pressure of about one atmosphere.
公开/授权文献
- US20080142715A1 MICROSCALE GAS DISCHARGE ION DETECTOR 公开/授权日:2008-06-19
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