Invention Grant
US07649670B2 Method and apparatus for controlling curvatures of microlenses and micromirrors
有权
用于控制微透镜和微镜的曲率的方法和装置
- Patent Title: Method and apparatus for controlling curvatures of microlenses and micromirrors
- Patent Title (中): 用于控制微透镜和微镜的曲率的方法和装置
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Application No.: US11245761Application Date: 2005-10-07
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Publication No.: US07649670B2Publication Date: 2010-01-19
- Inventor: Nagesh R. Basavanhally , Dan M. Marom
- Applicant: Nagesh R. Basavanhally , Dan M. Marom
- Applicant Address: US NJ Murray Hill
- Assignee: Alcatel-Lucent USA Inc.
- Current Assignee: Alcatel-Lucent USA Inc.
- Current Assignee Address: US NJ Murray Hill
- Agency: Wall & Tong, LLP
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
The invention includes a method and apparatus for controlling curvatures of light directing devices. The apparatus includes a first substrate portion having formed therein a plurality of cavities, and a substantially flexible membrane disposed over the cavities for forming a respective plurality of light directing mechanisms, the light directing mechanisms disposed over the cavities. The respective curvatures of the light directing mechanisms are set using a pressure difference across each of the membrane portions disposed over the cavities. The respective curvatures of the light directing mechanisms may be controllably adjusted during operation of the light directing mechanisms.
Public/Granted literature
- US20070079922A1 Method and apparatus for controlling curvatures of microlenses and micromirrors Public/Granted day:2007-04-12
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