发明授权
- 专利标题: Strained semiconductor power device and method
- 专利标题(中): 应变半导体功率器件及方法
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申请号: US11510541申请日: 2006-08-25
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公开(公告)号: US07651918B2公开(公告)日: 2010-01-26
- 发明人: Edouard D. de Frésart , Robert W. Baird
- 申请人: Edouard D. de Frésart , Robert W. Baird
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Ingrassia, Fisher & Lorenz, P.C.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Semiconductor structures (52-9, 52-11, 52-12) and methods (100-300) are provided for a semiconductor devices employing strained (70) and relaxed (66) semiconductors, The method comprises, forming (106, 208, 308) on a substrate (54, 56, 58) first (66-1) and second (66-2) regions of a first semiconductor material (66) of a first conductivity type and a first lattice constant spaced apart by a gap or trench (69), filling (108, 210, 308) the trench or gap (69) with a second semiconductor material (70) of a second, conductivity type and a second different lattice constant so that the second semiconductor material (70) is strained with respect to the first semiconductor material (66) and forming (110, 212, 312) device regions (80, 88, S, G, D) communicating with the first (66) and second (70) semiconductor materials and adapted to provide device current (87, 87′) through at least part of the strained second semiconductor material (70) in the trench (69). In a preferred embodiment, the relaxed semiconductor material is 80:20 Si:Ge and the strained semiconductor material is substantially Si.
公开/授权文献
- US20080048257A1 Strained semiconductor power device and method 公开/授权日:2008-02-28
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