发明授权
US07652370B2 Plastic microfabricated structure for biochip, microfabricated thermal device, microfabricated reactor, microfabricated reactor array, and micro array using the same 有权
用于生物芯片,微制造热装置,微制造反应堆,微制造反应堆阵列和使用其的微阵列的塑料微制造结构

Plastic microfabricated structure for biochip, microfabricated thermal device, microfabricated reactor, microfabricated reactor array, and micro array using the same
摘要:
Provided are a plastic microfabricated structure, and a microfabricated thermal device, a microfabricated reactor, a microfabricated reactor array and a micro array using the same, which may be applied to a bio chip, and the present invention may fabricate the plastic microfabricated structure for providing a heating region by means of insulating plastic, which has a thin thickness, flatness enough to allow a photolithography process to be performed, thermal isolation in its some or total area, and a small thermal mass, and on top of the heating region of the plastic microfabricated structure, a heater, a temperature sensor for sensing a temperature, an electrode, and an electrode pad are formed to thereby fabricate the microfabricated heating device, whereby element may be readily fabricated at a low cost, and the heating region is formed of a plastic thin layer, so that uniform temperature control is possible even with a low power, and various samples may be thermally treated at a fast speed to obtain their reaction and analysis.
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