发明授权
US07652370B2 Plastic microfabricated structure for biochip, microfabricated thermal device, microfabricated reactor, microfabricated reactor array, and micro array using the same
有权
用于生物芯片,微制造热装置,微制造反应堆,微制造反应堆阵列和使用其的微阵列的塑料微制造结构
- 专利标题: Plastic microfabricated structure for biochip, microfabricated thermal device, microfabricated reactor, microfabricated reactor array, and micro array using the same
- 专利标题(中): 用于生物芯片,微制造热装置,微制造反应堆,微制造反应堆阵列和使用其的微阵列的塑料微制造结构
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申请号: US10899177申请日: 2004-07-27
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公开(公告)号: US07652370B2公开(公告)日: 2010-01-26
- 发明人: Dae Sik Lee , Hae Sik Yang , Yong Taik Lim , Kwang Hyo Chung , Sung Jin Kim , Se Ho Park , Kyu Won Kim , Yun Tae Kim
- 申请人: Dae Sik Lee , Hae Sik Yang , Yong Taik Lim , Kwang Hyo Chung , Sung Jin Kim , Se Ho Park , Kyu Won Kim , Yun Tae Kim
- 申请人地址: KR Daejeon-Shi
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon-Shi
- 代理机构: Lowe Hauptman Ham & Berner, LLP
- 优先权: KR10-2003-0097066 20031226
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
Provided are a plastic microfabricated structure, and a microfabricated thermal device, a microfabricated reactor, a microfabricated reactor array and a micro array using the same, which may be applied to a bio chip, and the present invention may fabricate the plastic microfabricated structure for providing a heating region by means of insulating plastic, which has a thin thickness, flatness enough to allow a photolithography process to be performed, thermal isolation in its some or total area, and a small thermal mass, and on top of the heating region of the plastic microfabricated structure, a heater, a temperature sensor for sensing a temperature, an electrode, and an electrode pad are formed to thereby fabricate the microfabricated heating device, whereby element may be readily fabricated at a low cost, and the heating region is formed of a plastic thin layer, so that uniform temperature control is possible even with a low power, and various samples may be thermally treated at a fast speed to obtain their reaction and analysis.
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