发明授权
- 专利标题: Nano data writing and reading apparatus using cantilever structure and fabrication method thereof
- 专利标题(中): 使用悬臂结构的纳米数据写入读取装置及其制造方法
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申请号: US11183870申请日: 2005-07-19
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公开(公告)号: US07652972B2公开(公告)日: 2010-01-26
- 发明人: Hyo-Jin Nam , Young-Sik Kim
- 申请人: Hyo-Jin Nam , Young-Sik Kim
- 申请人地址: KR Seoul
- 专利权人: LG Electronics Inc.
- 当前专利权人: LG Electronics Inc.
- 当前专利权人地址: KR Seoul
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: KR10-2004-0056495 20040720
- 主分类号: G11B9/00
- IPC分类号: G11B9/00 ; H05B3/00
摘要:
A nano data writing and reading apparatus using a cantilever structure includes a cantilever formed by patterning a deposition material deposited on a sacrificial substrate, a probe formed at a front end portion of one surface of the cantilever and formed simultaneously with the cantilever as the deposition material is filled in a probe groove pattern formed on the sacrificial substrate when the deposition material is deposited on the sacrificial substrate, a heater formed of polycrystalline silicon at the cantilever, for heating the probe, a data sensing unit formed at the cantilever and sensing data written on media, a signal connection pad connected to the data sensing unit and formed at the cantilever to provide an electrical connection with an external signal line, a signal transfer circuit unit connected to the signal connection pad, for controlling writing and reading of data on and from the media, and a bonding unit allowing the cantilever to be supported at the signal transfer circuit unit and providing a passage for an electrical connection between the signal connection pad and the signal transfer circuit unit. Accordingly, the cantilever and the probe can be precisely formed by a molding technique through the removal of a sacrificial substrate and are formed of a deposition material such as a silicon nitride material, thereby remarkably reducing variations in a thickness of the cantilever and improving the durability of the probe. Also, because a bonding process with a glass wafer for fabricating the cantilever structure is not required, the process is facilitated and a fabrication coast is greatly reduced.
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