Invention Grant
- Patent Title: Method for nanostructuring of the surface of a substrate
- Patent Title (中): 衬底表面的纳米结构化方法
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Application No.: US11773082Application Date: 2007-07-03
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Publication No.: US07655578B2Publication Date: 2010-02-02
- Inventor: Frank Fournel , Jérôme Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
- Applicant: Frank Fournel , Jérôme Meziere , Alexis Bavard , Florent Pigeon , Florence Garrelie
- Applicant Address: FR Paris FR Saint Etienne FR Paris
- Assignee: Commissariat a l'Energie Atomique,Universite Jean Monnet,Centre National de la Recherche Scientifique
- Current Assignee: Commissariat a l'Energie Atomique,Universite Jean Monnet,Centre National de la Recherche Scientifique
- Current Assignee Address: FR Paris FR Saint Etienne FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0652981 20060713
- Main IPC: H01L21/26
- IPC: H01L21/26

Abstract:
Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighborhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps: formation, in the dislocations (3), of implants (6) made of a material other than that of the crystalline area (4); irradiation of the substrate (10) with electromagnetic waves (11) in order to cause absorption of electromagnetic energy localized in the implants (6), this absorption leading to the appearance of the periodic nanostructuring (12) on the surface of the substrate (10).
Public/Granted literature
- US20080280419A1 METHOD FOR NANOSTRUCTURING OF THE SURFACE OF A SUBSTRATE Public/Granted day:2008-11-13
Information query
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