发明授权
- 专利标题: On-chip cooling systems for integrated circuits
- 专利标题(中): 用于集成电路的片上冷却系统
-
申请号: US11869999申请日: 2007-10-10
-
公开(公告)号: US07659616B2公开(公告)日: 2010-02-09
- 发明人: Kaushik A. Kumar , Andres Fernando Munoz , Michael Ray Sievers , Richard Stephen Wise
- 申请人: Kaushik A. Kumar , Andres Fernando Munoz , Michael Ray Sievers , Richard Stephen Wise
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Schmeiser, Olsen & Watts
- 代理商 Steven Capella
- 主分类号: H01L23/34
- IPC分类号: H01L23/34
摘要:
Structures and methods for forming the same. A semiconductor chip includes a substrate and a transistor. The chip includes N interconnect layers on the substrate, N being a positive integer. The chip includes a cooling pipes system inside the N interconnect layers. The cooling pipes system does not include any solid or liquid material. Given any first point and any second point in the cooling pipes system, there exists a continuous path which connects the first and second points and which is totally within the cooling pipes system. A first portion of the cooling pipes system overlaps the transistor. A second portion of the cooling pipes system is higher than the substrate and lower than a top interconnect layer. The second portion is in direct physical contact with a surrounding ambient.
公开/授权文献
- US20090096056A1 ON-CHIP COOLING SYSTEMS FOR INTEGRATED CIRCUITS 公开/授权日:2009-04-16
信息查询
IPC分类: