发明授权
- 专利标题: Semiconductor integrated circuit
- 专利标题(中): 半导体集成电路
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申请号: US11594063申请日: 2006-11-08
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公开(公告)号: US07659629B2公开(公告)日: 2010-02-09
- 发明人: Yoshitaka Kimura
- 申请人: Yoshitaka Kimura
- 申请人地址: JP Mihama-ku
- 专利权人: Kawasaki Microelectronics, Inc.
- 当前专利权人: Kawasaki Microelectronics, Inc.
- 当前专利权人地址: JP Mihama-ku
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2005-325508 20051110
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
A semiconductor integrated circuit having a multilayer wiring structure is provided which includes: a top metal wiring layer (MTOP) including a plurality of top layer power supply wirings and a next-to-top metal wiring layer (MTOP-1) directly below the top metal wiring layer MTOP including a plurality of next-to-top layer power supply wirings. Each of the top layer and the next-to-top layer power supply wirings also includes first potential wirings for supplying a first potential to the circuit elements and second potential wirings for supplying a second potential to the circuit elements. The top layer power supply wirings and the next-to-top layer power supply wirings cross each other and have a top layer insulating film disposed between them. First and second contacts are provided in the insulating film for connecting the first potential wirings and second potential wirings in the top and the next-to-top metal wiring layers with each other.
公开/授权文献
- US20070102820A1 Semiconductor integrated circuit 公开/授权日:2007-05-10
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