发明授权
US07659736B2 Mechanically reconfigurable vertical tester interface for IC probing
有权
用于IC探测的机械可重构垂直测试仪接口
- 专利标题: Mechanically reconfigurable vertical tester interface for IC probing
- 专利标题(中): 用于IC探测的机械可重构垂直测试仪接口
-
申请号: US11761912申请日: 2007-06-12
-
公开(公告)号: US07659736B2公开(公告)日: 2010-02-09
- 发明人: Benjamin N. Eldridge , Barbara Vasquez , Makarand S. Shinde , Gaetan L. Mathieu , A. Nicholas Sporck
- 申请人: Benjamin N. Eldridge , Barbara Vasquez , Makarand S. Shinde , Gaetan L. Mathieu , A. Nicholas Sporck
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理商 N. Kenneth Burraston
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A wafer test assembly includes multiple probe head substrates arranged like tiles with connectors attached to one side and probes supported on the opposing side. In one embodiment, flexible cable connectors directly connect the connectors on the probe head tile to a test head, while in another embodiment the flexible cables connect the probe head tile to a PCB providing horizontal routing to test head connectors. In one embodiment, leveling pins provide a simplified support structure connecting to a retaining element attached to the tiles to provide for applying a push-pull leveling force. A test head connector interface frame enables rearrangement of connectors between the test head and the probe card to provide for both full wafer contact or partial wafer contact. The test head connectors are rearranged by being slidable on rails, or pluggable and unpluggable enabling movement over a range of positions.
公开/授权文献
信息查询