Invention Grant
- Patent Title: Micromachined artificial haircell
- Patent Title (中): 微加工人造毛细胞
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Application No.: US11809523Application Date: 2007-06-01
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Publication No.: US07661319B2Publication Date: 2010-02-16
- Inventor: Chang Liu , Jonathan Engel , Nannan Chen , Jack Chen
- Applicant: Chang Liu , Jonathan Engel , Nannan Chen , Jack Chen
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Greer, Burns & Crain, Ltd.
- Main IPC: G01B7/16
- IPC: G01B7/16
Abstract:
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
Public/Granted literature
- US20080072683A1 Micromachined artificial haircell Public/Granted day:2008-03-27
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