发明授权
- 专利标题: 3-Dimensional flash memory device and method of fabricating the same
- 专利标题(中): 3维闪存器件及其制造方法
-
申请号: US12111633申请日: 2008-04-29
-
公开(公告)号: US07662720B2公开(公告)日: 2010-02-16
- 发明人: Sung-Min Kim , Eun-Jung Yun , Dong-Won Kim , Jae-Man Yoon
- 申请人: Sung-Min Kim , Eun-Jung Yun , Dong-Won Kim , Jae-Man Yoon
- 申请人地址: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- 代理机构: Muir Patent Consulting, PLLC
- 优先权: KR2005-0011008 20050205
- 主分类号: H01L21/311
- IPC分类号: H01L21/311
摘要:
In an embodiment, a 3-dimensional flash memory device includes: a gate extending in a vertical direction on a semiconductor substrate; a charge storing layer surrounding the gate; a silicon layer surrounding the charge storing layer; a channel region vertically formed in the silicon layer; and source/drain regions vertically formed on both sides of the channel region in the silicon layer. Integration can be improved by storing data in a 3-dimensional manner; a 2-bit operation can be performed by providing transistors on both sides of the gate.
公开/授权文献
信息查询
IPC分类: