Invention Grant
US07663122B2 Laser analytical instrument, laser analytical method, and gas leak inspection instrument 有权
激光分析仪,激光分析仪,气体泄漏检测仪

Laser analytical instrument, laser analytical method, and gas leak inspection instrument
Abstract:
Laser light generated from laser light generating means (10) is fed through laser light transfer means (11) including a demagnification optical system (23) so as to be condensed in a part Ex where an object gas of analysis exists. The laser light is imparted with energy for causing a multiple photon excitation phenomenon or a multiple photon ionization phenomenon of gas in the condensed part Ex. The energy of the laser light is large enough for 17 eV or higher energy to be injected into a hydrogen molecule when the object gas of analysis is hydrogen and for 23 eV or higher energy to be injected into a helium atom when the object gas of analysis is helium. For example, the intensity of the laser light in the condensed part Ex is 1014 W/cm2 or higher. This provides a laser analytical instrument capable of observing various types of gas through an inexpensive and simple arrangement.
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