Invention Grant
- Patent Title: Wire-type semiconductor devices and methods of fabricating the same
- Patent Title (中): 线型半导体器件及其制造方法
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Application No.: US11723074Application Date: 2007-03-16
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Publication No.: US07663166B2Publication Date: 2010-02-16
- Inventor: Suk-Pil Kim , Yoon-Dong Park , Won-Joo Kim
- Applicant: Suk-Pil Kim , Yoon-Dong Park , Won-Joo Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, PLC
- Priority: KR10-2006-0044635 20060518
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
Provided are relatively higher-performance wire-type semiconductor devices and relatively economical methods of fabricating the same. A wire-type semiconductor device may include at least one pair of support pillars protruding above a semiconductor substrate, at least one fin protruding above the semiconductor substrate and having ends connected to the at least one pair of support pillars, at least one semiconductor wire having ends connected to the at least one pair of support pillars and being separated from the at least one fin, a common gate electrode surrounding the surface of the at least one semiconductor wire, and a gate insulating layer between the at least one semiconductor wire and the common gate electrode.
Public/Granted literature
- US20080017934A1 Wire-type semiconductor devices and methods of fabricating the same Public/Granted day:2008-01-24
Information query
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