Invention Grant
US07663185B2 FIN-FET device structure formed employing bulk semiconductor substrate
有权
使用体半导体衬底形成的FIN-FET器件结构
- Patent Title: FIN-FET device structure formed employing bulk semiconductor substrate
- Patent Title (中): 使用体半导体衬底形成的FIN-FET器件结构
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Application No.: US11441724Application Date: 2006-05-27
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Publication No.: US07663185B2Publication Date: 2010-02-16
- Inventor: Kuang-Hsin Chen , Hsun-Chih Tsao , Jhi-Cherng Lu , Chuan-Ping Hou , Peng-Fu Hsu , Hung-Wei Chen , Di-Hong Lee
- Applicant: Kuang-Hsin Chen , Hsun-Chih Tsao , Jhi-Cherng Lu , Chuan-Ping Hou , Peng-Fu Hsu , Hung-Wei Chen , Di-Hong Lee
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co, Ltd
- Current Assignee: Taiwan Semiconductor Manufacturing Co, Ltd
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A fin-FET device and a method for fabrication thereof both employ a bulk semiconductor substrate. A fin and an adjoining trough are formed within the bulk semiconductor substrate. The trough is partially backfilled with a deposited dielectric layer to form an exposed fin region and an unexposed fin region. A gate dielectric layer is formed upon the exposed fin region and a gate electrode is formed upon the gate dielectric layer. By employing a bulk semiconductor substrate the fin-FET device is fabricated cost effectively.
Public/Granted literature
- US20070272954A1 FIN-FET device structure formed employing bulk semiconductor substrate Public/Granted day:2007-11-29
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