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US07663185B2 FIN-FET device structure formed employing bulk semiconductor substrate 有权
使用体半导体衬底形成的FIN-FET器件结构

FIN-FET device structure formed employing bulk semiconductor substrate
Abstract:
A fin-FET device and a method for fabrication thereof both employ a bulk semiconductor substrate. A fin and an adjoining trough are formed within the bulk semiconductor substrate. The trough is partially backfilled with a deposited dielectric layer to form an exposed fin region and an unexposed fin region. A gate dielectric layer is formed upon the exposed fin region and a gate electrode is formed upon the gate dielectric layer. By employing a bulk semiconductor substrate the fin-FET device is fabricated cost effectively.
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