- 专利标题: Method of manufacturing a variable resistance structure and method of manufacturing a phase-change memory device using the same
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申请号: US11428925申请日: 2006-07-06
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公开(公告)号: US07666789B2公开(公告)日: 2010-02-23
- 发明人: Suk-Hun Choi , Chang-Ki Hong , Yoon-Ho Son , Jang-Eun Heo
- 申请人: Suk-Hun Choi , Chang-Ki Hong , Yoon-Ho Son , Jang-Eun Heo
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce
- 优先权: KR10-2005-0067366 20050725
- 主分类号: H01L21/44
- IPC分类号: H01L21/44 ; H01L21/4763 ; H01L21/00
摘要:
In methods of manufacturing a variable resistance structure and a phase-change memory device, after forming a first insulation layer on a substrate having a contact region, a contact hole exposing the contact region is formed through the first insulation layer. After forming a first conductive layer on the first insulation layer to fill up the contact hole, a first protection layer pattern is formed on the first conductive layer. The first conductive layer is partially etched to form a contact and to form a pad on the contact. A second protection layer is formed on the first protection layer pattern, and then an opening exposing the pad is formed through the second protection layer and the first protection layer pattern. After formation of a first electrode, a phase-change material layer pattern and a second electrode are formed on the first electrode and the second protection layer.
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