发明授权
US07667050B2 Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
有权
适用于酸产生剂的盐和含有它的化学放大型正性抗蚀剂组合物
- 专利标题: Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
- 专利标题(中): 适用于酸产生剂的盐和含有它的化学放大型正性抗蚀剂组合物
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申请号: US11889596申请日: 2007-08-15
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公开(公告)号: US07667050B2公开(公告)日: 2010-02-23
- 发明人: Junji Shigematsu , Isao Yoshida , Yukako Harada , Masumi Suetsugu
- 申请人: Junji Shigematsu , Isao Yoshida , Yukako Harada , Masumi Suetsugu
- 申请人地址: JP Tokyo
- 专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人: Sumitomo Chemical Company, Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2006-225059 20060822
- 主分类号: C07C309/19
- IPC分类号: C07C309/19 ; C07D333/46
摘要:
The present invention provides a salt represented by the formula (I): wherein X represents a C3-C30 divalent group containing at least one divalent alicyclic hydrocarbon group, and at least one —CH2— in the C3-C30 divalent group may be substituted with —O— or —CO—, Y represents a C3-C30 cyclic hydrocarbon group which may be substituted with at least one group selected from a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group and a cyano group, and at least one —CH2— in the C3-C30 cyclic hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion.
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