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US07668668B2 Stress component measurement method 失效
应力分量测量方法

Stress component measurement method
Abstract:
A method of measuring a stress component in a short period of time in a nondestructive manner and a stress component measurement device that includes a stress component comparison section that compares a Raman spectrum L obtained in a predetermined area W1 of a reference specimen W to which a given stress component is applied with the stress component, a correlation data production section that produces correlation data indicating a correlation between the Raman spectrum L and the stress component by the use of a multivariate analysis method based on the comparison results conducted by the stress component comparison section. The comparison is conducted multiple times on different predetermined areas W1. A correlation data storage section stores the correlation data, and a stress component calculation section calculates a stress component applied to a measurement area W1′ of a measurement specimen W′ whose composition is the same as that of the reference specimen W based on the Raman spectrum L obtained from the measurement area W1′ and the correlation data.
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