发明授权
US07670863B2 Method of fabricating complementary metal oxide silicon image sensor
有权
互补金属氧化物硅图像传感器的制造方法
- 专利标题: Method of fabricating complementary metal oxide silicon image sensor
- 专利标题(中): 互补金属氧化物硅图像传感器的制造方法
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申请号: US11646805申请日: 2006-12-27
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公开(公告)号: US07670863B2公开(公告)日: 2010-03-02
- 发明人: Jin Han Kim
- 申请人: Jin Han Kim
- 申请人地址: KR Seoul
- 专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人: Dongbu Electronics Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: The Law Offices of Andrew D. Fortney
- 代理商 Andrew D. Fortney
- 优先权: KR10-2005-0131423 20051228
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Provided is a method of fabricating a complementary metal oxide silicon image sensor. The method includes: applying a passivation oxide and a passivation nitride after forming a pad; selectively removing the passivation nitride in a pad region and a pixel region by a photolithography process, and performing a first cleaning process; performing a hydrogen anneal process; opening the pad by removing the passivation oxide in the pad region and performing a second cleaning process; applying a pad protective layer; performing a color filter array process, a planarization process, and a microlens process after the applying of the pad protective layer; and removing the pad protective layer in the pad region.
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