Invention Grant
- Patent Title: Method for manufacturing semiconductor package
- Patent Title (中): 制造半导体封装的方法
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Application No.: US12153378Application Date: 2008-05-16
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Publication No.: US07670878B2Publication Date: 2010-03-02
- Inventor: Jing Li Yuan , Jae Cheon Doh , Tae Hoon Kim , Si Joong Yang , Seung Wook Park
- Applicant: Jing Li Yuan , Jae Cheon Doh , Tae Hoon Kim , Si Joong Yang , Seung Wook Park
- Applicant Address: KR Suwon
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon
- Priority: KR10-2007-0047995 20070517
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
Provided is a method for manufacturing a semiconductor package. In the method, a wafer for a cap substrate is provided. The wafer for the cap substrate includes a plurality of vias and via electrodes on a lower surface. A wafer for a device substrate is provided. The wafer for the device substrate includes a circuit unit and a connection electrode on an upper surface. The wafer for the cap substrate and the wafer for the device substrate are primarily bonded by a medium of a primary adhesive. A trench is formed to expose the upper surface of the wafer for the device substrate to an outside along an outer edge of the primary adhesive. A secondary bonding operation is performed by a medium of a secondary adhesive to electrically connect the via electrode and the connection electrode. The wafer for the device substrate is diced along a virtual cut line.
Public/Granted literature
- US20080286904A1 Method for manufacturing semiconductor package Public/Granted day:2008-11-20
Information query
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