发明授权
- 专利标题: Processing a memory link with a set of at least two laser pulses
- 专利标题(中): 用一组至少两个激光脉冲处理存储器链接
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申请号: US10322347申请日: 2002-12-17
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公开(公告)号: US07671295B2公开(公告)日: 2010-03-02
- 发明人: Yunlong Sun , Edward J. Swenson , Richard S. Harris
- 申请人: Yunlong Sun , Edward J. Swenson , Richard S. Harris
- 申请人地址: US OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: US OR Portland
- 代理机构: Stoel Rives LLP
- 主分类号: B23K26/02
- IPC分类号: B23K26/02 ; B23K26/08 ; H01L21/77
摘要:
A set (50) of laser pulses (52) is employed to sever a conductive link (22) in a memory or other IC chip. The duration of the set (50) is preferably shorter than 1,000 ns; and the pulse width of each laser pulse (52) within the set (50) is preferably within a range of about 0.1 ps to 30 ns. The set (50) can be treated as a single “pulse” by conventional laser positioning systems (62) to perform on-the-fly link removal without stopping whenever the laser system (60) fires a set (50) of laser pulses (52) at each link (22). Conventional IR wavelengths or their harmonics can be employed.
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