发明授权
US07671444B2 Empty vias for electromigration during electronic-fuse re-programming 有权
电子熔丝重新编程期间用于电迁移的空通孔

Empty vias for electromigration during electronic-fuse re-programming
摘要:
The disclosure relates generally to integrated circuit (IC) chip fabrication, and more particularly, to an e-fuse device including an opening, a first via and a second via in an interlayer dielectric, wherein the opening, the first via and the second via are connected to an interconnect below the interlayer dielectric; a dielectric layer that encloses the first via and the second via; and a metal layer over the dielectric layer, wherein the metal layer fills the opening with a metal, and wherein the first via and the second via are substantially empty to allow for electromigration of the interconnect during re-programming of the e-fuse device.
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