发明授权
- 专利标题: Versatile system for charge dissipation in the formation of semiconductor device structures
- 专利标题(中): 用于形成半导体器件结构的电荷耗散的通用系统
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申请号: US11420922申请日: 2006-05-30
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公开(公告)号: US07671445B2公开(公告)日: 2010-03-02
- 发明人: Weidong Tian , Bradley Sucher , Zafar Imam
- 申请人: Weidong Tian , Bradley Sucher , Zafar Imam
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Warren L. Franz; Wade J. Brady III; Frederick J. Telecky, Jr.
- 主分类号: H01L23/60
- IPC分类号: H01L23/60 ; H01L23/48
摘要:
The present invention provides a system for dissipating any aberrant charge that may accumulate during the fabrication of a semiconductor device segment (200), obviating overstress or break down damage to a focal device structure (208) that might result from uncontrolled dissipation of the aberrant charge. A substrate (202) has first and second intermediate structures (204, 206) disposed atop the substrate, with the focal structure disposed atop the substrate therebetween. A first conductive structure (210) is disposed atop the second intermediate structure, the focal structure, and a portion of the first intermediate structure. A third intermediate structure (214) is disposed contiguously atop the first conductive structure and the first intermediate layer. A void (216) is formed in a peripheral region (218) of device segment, through the first and third intermediate layers down to the substrate. A second conductive structure (220) is disposed atop the third intermediate structure such that it couples the substrate through the void.
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