发明授权
- 专利标题: Pole width control on plated bevel main pole design of a perpendicular magnetic recording head
- 专利标题(中): 极板宽度控制电镀斜面主极设计的垂直磁记录头
-
申请号: US10886284申请日: 2004-07-07
-
公开(公告)号: US07672079B2公开(公告)日: 2010-03-02
- 发明人: Donghong Li , Yoshitaka Sasaki
- 申请人: Donghong Li , Yoshitaka Sasaki
- 申请人地址: US CA Milpitas
- 专利权人: Headway Technologies, Inc.
- 当前专利权人: Headway Technologies, Inc.
- 当前专利权人地址: US CA Milpitas
- 代理机构: Saile Ackerman LLC
- 代理商 Stephen B. Ackerman
- 主分类号: G11B5/127
- IPC分类号: G11B5/127
摘要:
A main pole layer is deposited within an opening in a patterned photoresist layer on a substrate. The photoresist is thinned to expose an upper portion of a pole tip region that is then trimmed to a rectangular shape while a lower portion retains an inverted trapezoidal shape. Thereafter, a second trimming process forms a pole tip with a first width in the upper rectangular portion and a second thickness and second width which is less than the first width in the lower portion. A CMP step subsequently thins the upper portion to a first thickness of 0.04 to 0.08 microns while the second thickness remains at 0.16 to 0.32 microns. The bottom surface of the lower portion along the ABS becomes the trailing edge in a recording operation. The pole tip has a consistent first width (track width) that is not influenced by CMP process variations.
公开/授权文献
信息查询
IPC分类: