发明授权
- 专利标题: Optical waveguide device and fabricating method thereof
- 专利标题(中): 光波导器件及其制造方法
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申请号: US12314278申请日: 2008-12-08
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公开(公告)号: US07672559B2公开(公告)日: 2010-03-02
- 发明人: Taro Kaneko
- 申请人: Taro Kaneko
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP2002-068967 20020313
- 主分类号: G02B6/10
- IPC分类号: G02B6/10 ; B29D11/00
摘要:
Optical waveguide device has waveguide strip-shaped in the depth direction of the drawing and protruding from peripheral portion. A core (not illustrated) is disposed inside waveguide. Wall to be cut is integrated with waveguide to form one core layer. No unevenness occurs in a cutting line of wall indicated with broken line. Accordingly, high-precision cutting is enabled by cutting wall along the cutting line.
公开/授权文献
- US20090097812A1 Optical waveguide device and fabricating method thereof 公开/授权日:2009-04-16
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