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US07672559B2 Optical waveguide device and fabricating method thereof 失效
光波导器件及其制造方法

  • 专利标题: Optical waveguide device and fabricating method thereof
  • 专利标题(中): 光波导器件及其制造方法
  • 申请号: US12314278
    申请日: 2008-12-08
  • 公开(公告)号: US07672559B2
    公开(公告)日: 2010-03-02
  • 发明人: Taro Kaneko
  • 申请人: Taro Kaneko
  • 申请人地址: JP Tokyo
  • 专利权人: NEC Corporation
  • 当前专利权人: NEC Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Foley & Lardner LLP
  • 优先权: JP2002-068967 20020313
  • 主分类号: G02B6/10
  • IPC分类号: G02B6/10 B29D11/00
Optical waveguide device and fabricating method thereof
摘要:
Optical waveguide device has waveguide strip-shaped in the depth direction of the drawing and protruding from peripheral portion. A core (not illustrated) is disposed inside waveguide. Wall to be cut is integrated with waveguide to form one core layer. No unevenness occurs in a cutting line of wall indicated with broken line. Accordingly, high-precision cutting is enabled by cutting wall along the cutting line.
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