发明授权
US07674572B2 Exposure mask pattern for LCD and exposure method using the same
有权
用于LCD的曝光掩模图案和使用它的曝光方法
- 专利标题: Exposure mask pattern for LCD and exposure method using the same
- 专利标题(中): 用于LCD的曝光掩模图案和使用它的曝光方法
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申请号: US11170849申请日: 2005-06-29
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公开(公告)号: US07674572B2公开(公告)日: 2010-03-09
- 发明人: Kwang Hoon Shin , Hyun Suk Jin , Ho Jin Ryu , Won Seok Kang , Deuk Su Lee
- 申请人: Kwang Hoon Shin , Hyun Suk Jin , Ho Jin Ryu , Won Seok Kang , Deuk Su Lee
- 申请人地址: KR Seoul
- 专利权人: LG. Display Co., Ltd.
- 当前专利权人: LG. Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: KR10-2004-0072883 20040913
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G02F1/13
摘要:
An exposure method for an LCD is provided. In the method, a sub-pixel region of an array substrate is divided into a first exposure region and a second exposure region, and the first exposure region and the second exposure region are sequentially exposed.
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