发明授权
- 专利标题: CMOS structure including topographic active region
- 专利标题(中): CMOS结构包括地形活动区域
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申请号: US11562093申请日: 2006-11-21
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公开(公告)号: US07674667B2公开(公告)日: 2010-03-09
- 发明人: Huilong Zhu
- 申请人: Huilong Zhu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Ian D. MacKinnon, Esq.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A CMOS structure includes a first device located using a first active region within a semiconductor substrate, where the first active region is planar and has a first crystallographic orientation. The CMOS structure also includes a second device that is located using a second active region within the semiconductor substrate, where the second active region is topographic and has a second crystallographic orientation absent the first crystallographic orientation. The first crystallographic orientation and the second crystallographic orientation allow for performance optimizations of the first device and the second device, typically with respect to charge carrier mobility. The topographic second active region may also have a single thickness. The CMOS structure may be fabricated using a crystallographically specific etchant for forming the topographic second active region.
公开/授权文献
- US20080116522A1 CMOS STRUCTURE INCLUDING TOPOGRAPHIC ACTIVE REGION 公开/授权日:2008-05-22
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