Invention Grant
- Patent Title: Semiconductor structure with enhanced performance using a simplified dual stress liner configuration
- Patent Title (中): 使用简化的双重应力衬垫配置提高性能的半导体结构
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Application No.: US11468958Application Date: 2006-08-31
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Publication No.: US07675118B2Publication Date: 2010-03-09
- Inventor: Dureseti Chidambarrao , Yaocheng Liu , William K. Henson
- Applicant: Dureseti Chidambarrao , Yaocheng Liu , William K. Henson
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
A semiconductor structure including an nFET having a fully silicided gate electrode wherein a new dual stress liner configuration is used to enhance the stress in the channel region that lies beneath the gate electrode is provided. The new dual stress liner configuration includes a first stress liner that has an upper surface that is substantially planar with an upper surface of a fully silicided gate electrode of the nFET. In accordance with the present invention, the first stress liner is not present atop the nFET including the fully silicided gate electrode. Instead, the first stress liner of the present invention partially wraps around, i.e., surrounds the sides of, the nFET with the fully silicided gate electrode. A second stress liner having an opposite polarity as that of the first stress liner (i.e., of an opposite stress type) is located on the upper surface of the first stress liner as well as atop the nFET that contains the fully silicided FET. In accordance with the present invention, the first stress liner is a tensile stress liner and the second stress liner is a compressive stress liner.
Public/Granted literature
- US20080054357A1 SEMICONDUCTOR STRUCTURE WITH ENHANCED PERFORMANCE USING A SIMPLIFIED DUAL STRESS LINER CONFIGURATION Public/Granted day:2008-03-06
Information query
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