发明授权
US07675125B2 NAND-type nonvolatile memory device and related method of manufacture
有权
NAND型非易失性存储器件及其制造方法
- 专利标题: NAND-type nonvolatile memory device and related method of manufacture
- 专利标题(中): NAND型非易失性存储器件及其制造方法
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申请号: US11651543申请日: 2007-01-10
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公开(公告)号: US07675125B2公开(公告)日: 2010-03-09
- 发明人: Hyun-Mog Park , Seung-Jun Lee , Hyun-Jung Kim
- 申请人: Hyun-Mog Park , Seung-Jun Lee , Hyun-Jung Kim
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2006-0097315 20061002
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
In a NAND type nonvolatile memory device, a first insulating layer covers a common drain region formed in a string active region and a peripheral active region. A second insulating layer covers the first insulating layer. A bit line plug penetrates the first and second insulating layers and is connected to the common drain region. A peripheral lower plug penetrates the first insulating layer and is connected to the peripheral active region. A peripheral upper plug penetrates the second insulating layer and is stacked on the peripheral lower plug.
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