发明授权
- 专利标题: Forming copper interconnects with Sn coatings
- 专利标题(中): 与Sn涂层形成铜互连
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申请号: US11074456申请日: 2005-03-07
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公开(公告)号: US07675177B1公开(公告)日: 2010-03-09
- 发明人: Hongqiang Lu , Byung-Sung Kwak , Wilbur G. Catabay
- 申请人: Hongqiang Lu , Byung-Sung Kwak , Wilbur G. Catabay
- 申请人地址: US CA Milpitas
- 专利权人: LSI Corporation
- 当前专利权人: LSI Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Bever Law Group LLP
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
A copper interconnect with a Sn coating is formed in a damascene structure by forming a trench in a dielectric layer. The trench is formed by electroplating copper simultaneously with a metal dopant to form a doped copper layer. The top level of the doped copper layer is reduced to form a planarized surface level with the surface of the first dielectric layer. The doped copper is annealed to drive the metal dopants to form a metal dopant capping coating at the planarized top surface of the doped copper layer.
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