Invention Grant
- Patent Title: Double stage charged particle beam energy width reduction system for charged particle beam system
- Patent Title (中): 用于带电粒子束系统的双级带电粒子束能量减小系统
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Application No.: US10571347Application Date: 2004-09-02
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Publication No.: US07679054B2Publication Date: 2010-03-16
- Inventor: Jürgen Frosien , Ralf Degenhardt , Stefan Lanio
- Applicant: Jürgen Frosien , Ralf Degenhardt , Stefan Lanio
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP03020710 20030911; EP03020711 20030911; EP03028696 20031216
- International Application: PCT/EP2004/009801 WO 20040902
- International Announcement: WO2005/024888 WO 20050317
- Main IPC: H01J49/00
- IPC: H01J49/00

Abstract:
The present invention relates to e.g. a charged particle beam energy width reduction system for a charged particle beam with a z-axis along the optical axis and a first and a second plane, comprising, a first element acting in a focusing and dispersive manner, a second element acting in a focusing and dispersive manner, a first quadrupole element being positioned such that, in operation, a field of the first quadrupole element overlaps with a field of the first element acting in a focusing and dispersive manner, a second quadrupole element being positioned such that, in operation, a field of the second quadrupole element overlaps with a field of the second element acting in a focusing and dispersive manner, a first charged particle selection element being positioned, in beam direction, before the first element acting in a focusing and dispersive manner, and a second charged particle selection element being positioned, in beam direction, after the first element acting in a focusing and dispersive manner. Thereby, a virtually dispersive source-like location without an inherent dispersion limitation can be realized.
Public/Granted literature
- US20070200069A1 Double Stage Charged Particle Beam Energy Width Reduction System For Charged Particle Beam System Public/Granted day:2007-08-30
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