Invention Grant
- Patent Title: Split gate type non-volatile memory device and method of manufacturing the same
- Patent Title (中): 分闸式非易失性存储器件及其制造方法
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Application No.: US11516098Application Date: 2006-09-05
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Publication No.: US07679126B2Publication Date: 2010-03-16
- Inventor: Jin Hyo Jung
- Applicant: Jin Hyo Jung
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2005-0082233 20050905
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A non-volatile memory device (e.g., a split gate type device) and a method of manufacturing the same are disclosed. The memory device includes an active region on a semiconductor substrate, a pair of floating gates above the active region, a charge storage insulation layer between each floating gate and the active region, a pair of wordlines over the active region and partially overlapping the floating gates, respectively, and a gate insulation film between each wordline and the active region. The method may prevent or reduce the incidence of conductive stringers on the active region between the floating gates, to thereby improve reliability of the memory devices and avoid the active region resistance from being increased due to the stringer.
Public/Granted literature
- US20070052007A1 Split gate type non-volatile memory device and method of manufacturing the same Public/Granted day:2007-03-08
Information query
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