发明授权
- 专利标题: Semiconductor device and method for manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11938441申请日: 2007-11-12
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公开(公告)号: US07679144B2公开(公告)日: 2010-03-16
- 发明人: Hiroshi Kudo , Kenji Ishikawa
- 申请人: Hiroshi Kudo , Kenji Ishikawa
- 申请人地址: JP Yokohama
- 专利权人: Fujitsu Microelectronics Limited
- 当前专利权人: Fujitsu Microelectronics Limited
- 当前专利权人地址: JP Yokohama
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/00 ; H01L21/84
摘要:
The semiconductor device includes a silicon substrate, a device isolation insulating film dividing an active region of the silicon substrate into plural pieces, a gate electrode formed on the active region, a source/drain region which is formed in the active region on both sides of the gate electrode, and which constitutes a MOS transistor of an SRAM memory cell with the gate electrode, an interlayer insulating film formed over each of the active region and the device isolation insulating film, a first hole which is formed in the interlayer isolation insulating film, and which commonly overlaps with two adjacent active regions and the device isolation insulating film between the active regions, and a first conductive plug which is formed in the first hole, and which electrically connects the two active regions.
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