发明授权
US07679274B2 Monolithic piezo actuator with a change in the electrode structure in the junction region, and use of the piezo actuator
有权
单片压电致动器在接合区域中具有电极结构的变化,并使用压电致动器
- 专利标题: Monolithic piezo actuator with a change in the electrode structure in the junction region, and use of the piezo actuator
- 专利标题(中): 单片压电致动器在接合区域中具有电极结构的变化,并使用压电致动器
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申请号: US11996601申请日: 2006-07-26
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公开(公告)号: US07679274B2公开(公告)日: 2010-03-16
- 发明人: Harald Johannes Kastl , Carsten Schuh
- 申请人: Harald Johannes Kastl , Carsten Schuh
- 申请人地址: DE Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DE Munich
- 代理机构: King & Spalding L.L.P.
- 优先权: DE102005034814 20050726
- 国际申请: PCT/EP2006/007406 WO 20060726
- 国际公布: WO2007/012485 WO 20070201
- 主分类号: H01L41/083
- IPC分类号: H01L41/083 ; H01L41/047
摘要:
A piezo actuator in a monolithic multilayer design, has at least one piezoelectrically active stack element, wherein the stack element has stacked piezoceramic layers made of piezoceramic material and electrode layers arranged between the piezoceramic layers, at least one piezoelectrically inactive terminating region arranged above the stack element, and at least one junction region arranged between the stack element and the terminating region, wherein the stack element, the terminating region and the junction region are connected to one another to form a monolithic total stack. The junction region has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, and the piezoceramic layers and the electrode layers are in a form and are arranged on one another such that in the stack direction of the junction region one piezoelectrically active area per junction piezoceramic layer is successively changed from piezoceramic layer to piezoceramic layer.
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