发明授权
- 专利标题： Method for correcting an error of the imaging system of a coordinate measuring machine
- 专利标题（中）： 用于校正坐标测量机的成像系统的误差的方法
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申请号： US12218387申请日： 2008-07-15
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公开(公告)号： US07680616B2公开(公告)日： 2010-03-16
- 发明人: Michael Heiden , Klaus Rinn
- 申请人： Michael Heiden , Klaus Rinn
- 申请人地址： DE Weilburg
- 专利权人： Vistec Semiconductor Systems GmbH
- 当前专利权人： Vistec Semiconductor Systems GmbH
- 当前专利权人地址： DE Weilburg
- 代理机构： Davidson, Davidson & Kappel, LLC
- 优先权： DE102007033345 20070716
- 主分类号： G01C17/38
- IPC分类号： G01C17/38
摘要：
A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated.
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