发明授权
- 专利标题: Calibrating force and displacement sensors of mechanical probes
- 专利标题(中): 机械探头的校准力和位移传感器
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申请号: US11609523申请日: 2006-12-12
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公开(公告)号: US07681432B2公开(公告)日: 2010-03-23
- 发明人: Jennifer Hay , Warren Oliver
- 申请人: Jennifer Hay , Warren Oliver
- 申请人地址: US CA Santa Clara
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: G01B3/30
- IPC分类号: G01B3/30
摘要:
Concepts presented herein relate to a portable device that includes a frame and a fixture for engaging a mechanical probe to be calibrated. The fixture can be a platform of hard material that receives pushing action of the mechanical probe. A displacement sensor senses position of the platform with respect to the frame. An actuator is coupled to the displacement sensor and a controller is coupled to the actuator. The controller operates the actuator to cause the platform to move to a position (as indicated by the displacement sensor), while the force required to cause the displacement is measured with a force sensor.
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